Ceramic chip capacitor of conventional volume and external form having increased capacitance from use of closely spaced interior conductive planes reliably connecting to positionally tolerant exterior pads through multiple redundant vias

ABSTRACT

A capacitor including at least one interior metallization plane or plate and a multiplicity of vias for forming multiple redundant electrical connections within the capacitor. Series capacitors are provided having at least two interior plates redundantly electrically connected to at least two respective exterior plates. R-C devices are provided having multiple redundant vias filled with resistor material and/or conductor material to provide a resistor either in series with or parallel to a capacitor. Capacitors and R-C devices are provided having end terminations for applying voltage differential. Further, a method for making single capacitors, multiple parallel array capacitors, series capacitors and R-C devices is provided in which the chips are formed from the bottom up.

CROSS-REFERENCE TO RELATED APPLICATION

This is a divisional of prior application Ser. No. 09/875,347, filed on Jun. 6, 2001 now U.S. Pat. No. 6,542,352, which is a continuation-in-part of application Ser. No. 08/987,463, filed on Dec. 9, 1997, now U.S. Pat. No. 6,366,443.

FIELD OF THE INVENTION

The present invention generally concerns “parallel plate” or “single layer” capacitors as are typically made by metallizing two faces of a thin sheet of ceramic so as to make a ceramic capacitor.

The present invention further concerns high-capacity ceramic capacitors having (i) internal conductive planes connected by (ii) multiple redundant (preferably radiation patterned) vias to (iii) improved, alignment-insensitive and anti-wicking, surface pads to which electrical connection may be made.

BACKGROUND OF THE INVENTION Description of the Prior Art

State of the Art in Capacitor Technology Circa 1997, and Industry Impetus for Certain Improvements of All Types

As reported by free-lance writer Hailey Lynn McKeefry in the article “Capacitor Technology Marches Ahead” appearing in the February, 1994, issue of Electronic Buyer's News, capacitors were then, and are now, a mature component in a mature market. Nonetheless to this maturity, U.S. manufacturers are striving mightily to improve both tantalum and ceramic capacitors. “The fact that everything you buy performs better and costs less then what you bought last year is what keeps this industry going,” said Terry Weaver, president and chief operating office at Kemet Electronics Corp., Greenville, S.C. In this sentiment the inventors of the present invention concur.

As with just about any electronic component, the motto of capacitor purchasers and manufacturers alike is “smaller is better.” Capacitor manufacturers are working toward cases with smaller footprints and lower profiles. For example, the Sprague division of Vishay Electronic Components of North America and Asia developed a molded surface-mount tantalum capacitor with a rating of 6.8 microfarads in an R-size case. In September, 1997, Myrtle Beach, S.C.-based AVX Corp. announced a low-profile V-size case for its tantalum surface-mount capacitors. The PCS-V series is designed to provide capacitance/voltage (C/V) ratings higher than 3,500 and improved power dissipation. The V case measures less than 7 mm×6 mm, with a height of just 3.45 mm.

In the marketplace for ceramic capacitors (to which the present invention pertains), the 0805 case size remains popular although there is a significant move to 0603s, and even increased interest in 0402s. “Designers are leap-frogging the 0805 packages in favor of the 0603s in some designs,” said Kevin Rafferty, marketing manager for ceramic capacitors at Philips Electronic Components, Jupiter, Fla. Rafferty predicts that 0805s—with a 30% share of ceramic volume—will continue to take the biggest share of the market, while 0603s will claim 20% and 0402s 5%. The remaining 35% will be divided among products in 1206 and larger packages. In 1996, 0603 packages accounted for only 5% of the market share. “The 0805s are stable, while 1206 packages are losing share,” he said.

Part of what is holding the 0402s back is their diminutive size. “They are just too hard to handle,” Kemet's Weaver said. “A number of our customers can't place them at all.” To combat these complaints, some companies such as Murata Electronics North America Inc. are developing ways of handling the components. The manufacturer has created a small plastic case with a flip top that can hold 50,000 to 80,000 pieces. This box is slipped into a slot on the placement equipment. In comparison, a typical tape-and-reel holds about 5,000 parts. Although Murata developed the bulk cassette technology, others now offer it. For example, Kemet will ship the 0603 and 0402 sizes of its capacitors that use the X7R and C0G dielectrics in cassettes that can hold 15,000 units of the 0603 chips and 50,000 units of the 0402 chips.

Another emerging solution is the use of capacitor arrays, in which several components are encased in a single package. The present invention will be seen to well support capacitor arrays. With these arrays, OEMs are able to avoid the placement issues surrounding very small chips. In addition, they save on-board real estate and component placement costs. A standard array contains two to four chips. However, use of these packages is still limited to specialized niche markets. One of the biggest drawbacks of this packaging strategy is that all of the capacitors in the array have heretofore been required to be of the same value. The present invention will be seen to readily overcome this limitation.

The fact that the Electronic Industries Associate has not settled on a standard case size has also inhibited sales of arrayed capacitors. Heretofore the case size was strongly, even inflexibly, linked to the capacitance value. Therefore standardization of the case sizes was, to some extend, a standardization of the capacitance values with which, for a particular packaging technology, circuit designers could work. The present invention will be seen to sever this relationship, and present a greater opportunity than heretofore of producing a ceramic capacitor of any desired value (within limits) inside a standard case, or a reduced number of standard cases.

A similar trend is occurring in the tantalum capacitor market. “We are seeing uses of each case size (A, B, C, and D) going to the next-smallest case size to save real estate, while getting the same values,” said Willing S. King, marketing manager for tantalum products at AVX. “In turn, we are using less material and passing that savings on to the customer.” There is about a 10% price difference between case sizes, he estimated.

Computer makers primarily use C and D case sizes, while telecommunications and cellular manufacturers, the two biggest markets for tantalum capacitors, prefer the A and B sizes. A standard A case measures about 1.6 mm, while a B case is 2 mm high. Despite some similarities, the ceramic- and tantalum-capacitor businesses are, in fact, very different. In the ceramic marketplace, some of the primary focuses include advancing dielectric technologies and the advent of low-inductance products. Tantalum manufacturers, on the other hand, are concentrating on lowering equivalent-series-resistance (ESR) ratings and increasing C/V ratings.

Two popular dielectrics are the Y5V and X7R. Y5V is a general-purpose dielectric without the tighter tolerances offered by the X7R. It offers an operating temperature range of (approximately) −30° C. to +85° C., and is favored in cost-sensitive consumer applications. The X7R, which is more temperature stable, can handle from −55° C. to +125° C. However, the dielectric coefficient K of the Y5V dielectric is approximately 15,000; the K of the X7R dielectric only about 4000. Accordingly, the advantage that a high-dielectric-constant dielectric offers for realizing much higher capacitance in a single chip comes at the expense of temperature stability. There has therefore heretofore been a trade-off: improved dielectric performance with resultantly increased capacitance (for the same form factor) versus enhanced temperature sensitivity. The present invention will again be seen to substantially obviate this concern, and to permit the production of ceramic capacitors of desirably high capacitance by use of only the dielectrics having lower dielectric coefficients.

OEMs have begun to replace tantalum chips with ceramic parts in some instances. “Higher capacitance values and cost effectiveness made surface-mount ceramic capacitors an increasingly popular alternative to tantalum caps,” said Philips' Rafferty. “Other advantages of ceramic chips include higher breakdown voltages, lower ESR, higher insulation resistance, and better pulse response for frequencies greater than 100 kHz. This means that the capacitance values can be 50% less than the equivalent tantalum caps.”

Low inductance is also in demand for the PC market, particularly as faster and faster microprocessors are designed into PCs. “There has been lots of interest in low-inductance products since the speed of processors is increasing and voltages for processors are dropping to 2.2V” Vishay's Gormally said. “Using higher-inductance parts can wreak havoc with those circuits.” Vitramon has recently introduced a ceramic chip capacitor in the 0612 format with only one-third the inductance (0.3 nanohenry) of its standard counterpart.

Lowered Equivalent Series Resistance, or ESR, is also desired. Tantalum capacitors in a C-case size are available in the range from 4V to 50V with a maximum ESR at 25° C. of 250 milliohms to 1,600 milliohms. However, OEMs continue to push for even lower values. State of the art is around 80 milliohms to 100 milliohms. The present invention will be seen to support very low resistance electrical connection to the plates of a ceramic capacitor, thus delivering a desirably low ESR.

State of the Art in Ceramic Capacitor Technology Circa 1997.

As demand for smaller, thinner, and lighter portable equipment, liquid crystal modules, and power supply modules grows, smaller and thinner ceramic capacitors are in greater demand. Since newer equipments tend to require (and provide) both higher performance and longer service life, the demand for ceramic capacitors, as opposed to tantalum or aluminum electrolytic capacitors, is greatly increasing.

To meet the demand, the industry is working, circa 1997, on increasing the capacitance, reducing the size, and improving the dielectric strength of ceramic capacitors. To manufacture a capacitor with a ceramic capacitance of 100 micro F, high technology is required to create a thin-layer dielectric substance of 5×10⁻⁶ meters or less, and to, in the case of multiple electrode ceramic capacitors, form capacitors of 300 or more buried layers. To do so, progress has been made in fine-graining ceramic material, particularly composite perovskite type ceramic, so that it can be thin-layered.

Recently achieved increases in capacitance have resulted in, for example, the commercialization by Murata Manufacturing Co., Ltd. (Japan) of its GRM 200 line of ceramic capacitors having up to 22 microfarads capacitance, with contemplated development of ceramic capacitors of up to 100 microfarads capacitance.

Applications of these improved, larger capacitance, ceramic capacitors include power supply modules, liquid crystal modules, and various portable equipments.

The new Murata Manufacturing Co., Ltd. GRM 200 series of large-capacitance monolithic chip ceramic capacitors include: capacitance 10 microfarads/10V of size: 3.2×2.5×1.5 mm; capacitance 22 microfarads/10V of size: 3.2×2.5×2.0 mm; and capacitance 10 microfarads/25V.

When small size is emphasized the sizes may be as small as 2.0×1.25×1.25 mm for the capacitance of 10 microfarads. When increased capacitance is emphasized 47 microfarads may be realized in a 3.2×2.5×1.5 mm size, 100 microfarad in a 4.5×3.2×2.5 mm size. Production of these new capacitors has reportedly been achieved by use of a thin-layer/multi-layer forming technology using improved materials.

Currently, demand for even smaller liquid crystal modules, power supply modules, and portable equipment is greatly increasing. Demand for these new capacitors is expected to expand with the need to downsize this type of equipment. Currently, the new capacitors are used mainly for smoothing in the DC-DC converters of portable equipments, noise-filtering in liquid crystal bias circuits, and smoothing/de-coupling in IC power supply lines of various equipments. The capacitors are being produced at levels from 20 to 50 million units per month as of 1996/97.

General Construction and Theory of Single-Layer Parallel-Plate Ceramic Capacitors

Existing “parallel plate” or “single layer” “chip” capacitors are built with two parallel conductive plates separated by a single, insulating dielectric layer that is typically made of ceramic. These single-layer parallel-plate ceramic capacitors have a very useful form factor which renders them suitable for automated assembly into microwave frequency circuits and similar applications. The normal form factor is a rectilinear parallelepiped body. Dimensions of the chip capacitors can be matched to the width of the strip lines upon which the capacitors are mounted and to which the capacitors electrically connect.

In assembly the bottom face of the chip capacitor is typically soldered or conductive epoxy attached to a conductive surface, or pad. The top face is typically ribbon, or wire, bonded to another connection point.

Most current chip capacitors are made by metallizing two faces of a thin sheet of sintered ceramic typically having a thickness in the rang of 4 mils (inches) to 10 mils (inches). The metallized sheet is then cut into small rectangular bodies by sawing or by abrasive cutting techniques. The sizes of the cut bodies range from, typically, 10 mils (inches) square to 50 mils (inches) square, although some applications use rectangular forms.

While the form factor of these devices is desirable, the amount of capacitance that can be achieved and quality factor of the devices has frequently limited their usefulness. The simplified equation for the capacitance of two parallel plates is C=kA/d; where C is capacitance in farads, k is the dielectric constant of the insulating material between the plates, A is the area of each of opposed plates in square meters, and d is the distance between the plates. Solution of this equation shows that a 20 mil square part (A) having a 5 mils thickness (d) in material having a relative dielectric constant of 100 gives a capacitance of 8 picofarads.

Adhesive Mounting of Single-Layer Parallel-Plate Ceramic Capacitors

Conductive adhesive, and particularly conductive epoxy adhesive, may be used to strongly permanently bond single-layer parallel-plate ceramic capacitors to a substrate. The capacitors are simultaneously (i) adhesively attached, and (ii) electrically connected, to a substrate circuit by first being placed in a puddle of liquid conductive epoxy, which epoxy is then cured. It is intended that the conductive epoxy contact only the underside conductive surface of the capacitor; electrical connection to the topside conductive surface being made by ribbon, or wire, bonding.

Sometimes, however, the liquid epoxy will wick up the sides of the capacitor, especially if these sides are (i) other than exactly perpendicular to the substrate, and/or (ii) too much epoxy is used. The conductive epoxy wicked up the sides of a single-layer parallel-plate ceramic capacitors may flow over onto, and electrically contact, the conductive topside surface of the capacitor, resulting in reduced resistance or even a total shorting of the capacitor.

Some manufacturers have previously gone to extraordinary lengths to angle the edges of their capacitors in order to avoid this problem. Generally, however, features that extend the body of the capacitor, and that thereby serve to isolate one or both of the conductive areas (plates) of its underside and topside surfaces, only serve to reduce the area of the plates for a given physical size, and thus adversely reduce the capacitance of a capacitor of any given size.

Creation of Vias in Ceramic Capacitors and Other Ceramic Electrical Components

The present invention will be seen to concern improvements in the creation of vias, or through holes—through which vias electrical connection can be made by the deposition of metal—in the ceramic electrical components having ceramic-covered or ceramic-encapsulated electrically connectable parts. The improvements are applicable to ceramic capacitors containing electrically conductive plates, but are not limited to ceramic capacitors, being also useful in fabrication of piezoelectric sensors and actuators, for example.

The conventional means for making vias is discussed in U.S. Pat. No. 4,864,465 for a VIAD CHIP CAPACITOR AND METHOD FOR MAKING SAME to William L. Robbins. The Robbins patent concerns a two pole viad chip capacitor activatable from either of its sides. The capacitor has (i) a plurality of ceramic layers in a stack, each and every layer having only two vias, a first via in a first region of each layer and a second via in a second region of each layer; (ii) a first conductor in each of the first vias; (iii) a second conductor in each of the second vias; (iv) a stack of first capacitor plates being on first alternate ceramic layers and each first plate being in electrical contact with a first conductor; (v) and a stack of second capacitor plates, the second plates being on second alternate ceramic layers that are interdigitated with the first alternate ceramic layers and in electrical contact with a second conductor.

The Robbins capacitor is a conventional-type ceramic chip capacitor solderable at both ends for use on printed circuit boards. The ceramic conventional volume and external form of the ceramic chip capacitor of the present invention will be seen, however, to be of a different nature. Namely, the (nominal) “top” and “bottom” of the capacitor have extensive conductive planes, or pads. This permits the new capacitor of the present invention to be machine located and soldered (typically) immediately adjacent integrated circuits in small packages—substantially unlike the Robbins capacitor.

The vias of the Robbins capacitor, and of other ceramic capacitors, may be mechanically punched in the green ceramic sheets, or may be punched through the ceramic sheets by hydraulic jets, before sintering of the multi-layer ceramic capacitor. The punching technique, in particular, continues to work well for the creation of vias in the ceramic capacitors of the present invention and is, indeed, used at a much higher density than heretofore in order to create a greatly increased number of vias per unit area, and overall, than heretofore.

However, fabrication of the improved capacitors of the present invention will also be seen to usefully employ a method of creating vias, or through-holes, in the ceramic of electrical components having ceramic-covered or ceramic-encapsulated electrically connectable parts by use of one or more photosensitive ceramic binders. A number of issued United States patents concern ceramic compositions having photosensitive binders, an exemplary five of which are patents assigned to E. I. Du Pont de Nemours and Company (Wilmington, Del.).

U.S. Pat. No. 4,613,560 to Dueber et al. for a PHOTOSENSITIVE CERAMIC COATING COMPOSITION assigned to E. I. Du Pont de Nemours and Company (Wilmington, Del.) concerns a photosensitive ceramic coating composition which is fired in a substantially non-oxidizing atmosphere comprising an admixture of: (a) finely divided particles of ceramic solids having a particularly defined surface area-to-weight ratio and particle size, and (b) finely divided particles of an inorganic binder having a particularly defined surface area-to-weight ratio and particle size, dispersed in an organic medium comprising (c) an organic polymeric binder and (d) a photoinitiation system, dissolved in (e) photohardenable monomer and (f) a volatile organic solvent.

U.S. Pat. No. 4,912,019 to Nebe et al. for a PHOTOSENSITIVE AQUEOUS DEVELOPABLE CERAMIC COATING COMPOSITION assigned to E. I. Du Pont de Nemours and Company (Wilmington, Del.) concerns a photosensitive ceramic coating composition which is fired in a substantially non-oxidizing atmosphere comprising an admixture of: (a) finely divided particles of ceramic solids having a surface area-to-weight ratio of no more than 10 m²/g and at least 80 wt. % of the particles having a size of 1-10 μm, and (b) finely divided particles of an inorganic binder having a glass transition temperature in the range from of 550° C. to 825° C., a surface area-to-weight ratio of no more than 10 m²/g and at least 90 wt. % of the particles having a size of 1-10 μm, the weight ratio of (b) to (a) being in a range from 0.6 to 2, dispersed in an organic medium comprising (c) an organic polymeric binder, and (d) a photoinitiation system, dissolved in (e) photohardenable monomer, and (f) an organic medium. An improvement to this composition comprises an organic polymeric binder containing a copolymer or interpolymer of a C₁-C₁₀ alkyl acrylate, C₁-C₁₀ methacrylate, styrene, substituted styrene or combinations thereof and an ethylenically unsaturated carboxylic acid, wherein a moiety in the binder derived from the unsaturated carboxylic acid comprises at least 15 wt. % of the polymer and wherein the binder has a molecular weight not greater than 50,000 and wherein the composition upon imagewise exposure to actinic radiation is developable in an aqueous solution containing 1% by weight sodium carbonate.

Similarly, U.S. Pat. No. 4,959,295 is for a PROCESS OF MAKING A PHOTOSENSITIVE SEMI-AQUEOUS DEVELOPABLE CERAMIC COATING COMPOSITION, U.S. Pat. No. 4,925,771 is for a PROCESS OF MAKING PHOTOSENSITIVE AQUEOUS DEVELOPABLE CERAMIC COATING COMPOSITION INCLUDING FREEZE DRYING THE CERAMIC SOLID PARTICLES; and U.S. Pat. No. 4,908,296 is for PHOTOSENSITIVE SEMI-AQUEOUS DEVELOPABLE CERAMIC COATING COMPOSITION.

SUMMARY OF THE INVENTION

The present invention contemplates a ceramic capacitor of conventional volume and external form—meaning a parallelepiped body having exterior pads to which electrical connection is made—that is enhanced in its capacitance by dint of including at least one interior metallization plane, and preferably one or more pairs of interior metallization planes, that are parallel to capacitor surfaces where exist pads and/or traces. Electrical connection between these interior metallization planes and the surface pads and/or traces (which pads and traces need not be, and which commonly are not, coextensive with the planes) is made though (i) abundant (ii) redundant vias.

In accordance with the physical law that capacitance between two conducting planes is inversely proportional to the distance of separation, the capacitance between these interior metallization planes—which capacitance is seen at the exterior of the capacitor when these internal planes are electrically connected to the exterior pads—is greater than that capacitance which would alternatively be seen between opposed exterior pads (which have heretofore served as the electrodes) should no electrically connected interior metallization plane(s) be present.

The present invention further contemplates that each interior metallization plane within a ceramic capacitor so constructed should be redundantly, and preferably massively redundantly, electrically connected to associated exterior pads by plural, and more preferably by multiple, vias. By this construction the enhanced-capacitance ceramic capacitor may be reliably conventionally fabricated in huge arrays (typically many thousands of capacitors) on workpiece “bars” regardless than any single one via, and some few vias, may not be properly located. Additionally, the redundant vias make a low-resistance electrical connection useful at high frequencies.

Moreover, the many vias are preferably located in a dense uniform pattern; normally a regular pin grid array. Because both (i) the interior metallization planes internal to the capacitor, and the (ii) exterior metallizations in the forms of traces and pads, do not commonly occupy all the area of the capacitor, this makes that many vias “lead to nowhere,” connecting to metallization at only one end (a “missed via”) or at neither end (an “empty via”). These “missed” and/or “empty” vias are intentional: they permit fabrication of diverse capacitors (i) by uniform processes in which (ii) alignment is not critical. In the course of capacitor fabrication, those vias that actually connect to metallization (which is typically more than 50%, but less than 100% of all vias) fill with metal. Those vias that do not serve to connect to metallization areas tend to close off, and heal, during annealing of the capacitor ceramic. The small regions where these “vestigial,” “empty” vias are present do not significantly affect capacitor performance.

The present invention further contemplates a ceramic capacitor having amply numerous, and amply large exterior pads so as to easily readily support positionally tolerant electrical connection. In particular, the exterior pads, of which there may commonly be but two located on opposed sides of the ceramic capacitor, are much, much larger than are the egress areas of (preferably multiple) vias that connect to interior metallization planes that are within the capacitor. The exterior pads are, indeed, so large as to span between multiple vias. Equivalently, it may be said that multiple vias connect each interior metallization plane to an associated external surface pad, and that the vias are thus “redundant.”

The present invention still further contemplates that all the collective large-area exterior pads (or pad) on at least one, and preferably both, surfaces of the capacitor should be withdrawn from the edges of the capacitor. It is thereby beneficially promoted that (insulating) epoxy adhesive will not wick onto the conductive pads of the capacitor, potentially interfering with electrical connection to these pads, during adhesive surface mounting of the capacitor.

Still other niceties are present in the improved capacitors, particularly including (i) parallelepiped ceramic bodies that are (by dint of the close interior metallization planes) of sufficient size and thickness so as to substantially avoid fracture during routine handling (regardless that the capacitance is much higher than even that which would normally be realized from a ceramic capacitor so excessively thin so as to typically be undesirably fragile), and (ii) rounded edges.

Finally, the present invention contemplates improved methods of realizing the abundant multiple vias; namely, the vias are either (i) stamped as a grid array in the green ceramic sheets (from which the ceramic capacitor is made), or else (ii) patterned with radiation, normally ultraviolet light, in a ceramic dielectric tape having a photosensitive binder. In the case of method (ii), unexposed areas of the tape are cost effectively washed out with solvent, instead of being punched out, before sintering of the ceramic so as to easily and accurately create multitudinous holes.

Howsoever abundantly perforated, the perforated ceramic tape is used to make wafers of arrayed ceramic capacitors the future vias are accurately precisely positionally located. Notably the ample, and amply large pads, that are, as previously explained, positionally tolerant of later external electrical connection are to some extent made possible by the precise location of the many vias. Namely, the vias typically serve to define the boundaries of the pads, and the precise location of these vias permits the pads, even as they are preferably withdrawn from the edges of the capacitor, to advantageously occupy all available surface area, and to partition this area optimally.

Quite simply, the interior structures and geometries of the ceramic capacitor (the potentially many metallization planes, and the many permissible geometries of these metallization planes) are divorced from the exterior structures and geometries of the same ceramic capacitor (the potentially many pads and vias, and the many permissible geometries of these pads and vias), and vice-versa. Each region is substantially optimized for its function without making such compromises to the function of the other region as have heretofore been made. For devices that are made in quantities of hundreds of millions of units, these improvements are worth making.

Accordingly, the present invention offers the following advantages.

The usefulness and/or capacitance of ceramic capacitors of conventional external shapes and forms is extended either by (i) producing a higher capacitance for a given dielectric formulation, (ii) producing the same capacitance with a dielectric formulation that is either less expensive and/or less temperature sensitive, and/or (iii) producing the same capacitance with the same dielectric formulation in a geometrically smaller volume.

A conventional single-layer ceramic capacitor has a thickness of 5 mils or greater whereas the thickness of the active layer of the capacitors of the present invention is typically only 0.5 mils or less. This accords a ten times (×10) improvement in capacitance.

This improvement in capacitance can be “traded off” to produce a capacitor of equal size with improved temperature stability. For example, a conventional 5 volt ceramic capacitor with an 85° C. maximum temperature rating could be replaced with the X7R dielectric material, according a maximum temperature rating of 125° C., while maintaining equal capacitance by use of the present invention.

Meanwhile, user yields are improved. Namely, the area(s) and/or the location(s) of surface pads and/or traces are optimized—especially as such may be withdrawn slightly from the edges of the capacitor to alleviate shorts during adhesive mounting—so as to improve user yields in mounting and connecting the capacitors without sacrificing either (i) capacitance nor (ii) small size.

Meanwhile, ESR is excellent. The preferred abundant, and redundant, vias connecting the ample, reliably connected surface pads to the internal metallization planes ensure a low Equivalent Series Resistance (ESR), and thus good high-frequency performance.

Meanwhile, reliability is high. The new capacitors are a true monolithic structure, with the potentially delicate electrodes buried within the three-dimensional body of the capacitor while the surface pads and traces are typically made robust, and resistant to all temperatures and atmospheres to which the capacitor may be exposed. The surface material is, in particular, unlikely to delaminate, nor to corrode.

The capacitors of the present invention are truly monolithic devices, being co-fired in all layers at the same time. It is known in the ceramic business that the atmospheric sintered surface of a ceramic piece is different than the interior of the ceramic. In particular, the oxidation potential is different at the surface than in the interior. The surface typically comes into contact with a dissimilar ceramic during processing. Zirconia oxide carriers such as those supplied by Applied Ceramic of Georgia are commonly used as sintering aids. Considerable pre-processing or “seating” of the ceramic bodies is often done to reduce the diffusion of these zirconia sintering aids into the capacitor and into the capacitor dielectric compounds during high temperature processing.

In the traditional, single-layer ceramic capacitors, the metallized surface conduction areas typically use glass frits as the adhesion mechanism to adhere the metal to the ceramic. The resulting system typically has a glass-rich zone at the ceramic surface.

Both the (i) zirconia and the (ii) glass are adverse to the creation of uniform, quality capacitor electrodes. (Where the (i) zirconia and/or the (ii) glass is present, there the metal is not.) By putting the capacitance forming elements into the interior of the ceramic capacitor, the present invention completely avoids the issue of surface anomalies.

The present invention mandates vias. Thus it is somewhat disingenuous to claim that vias are an advantage of the invention. It might better be said that the concept of abundant redundant vias is, as expressed for capacitors in the preferred embodiment of the present invention, applicable to other devices, including piezoelectric sensors. The redundant via holes all but eliminate the requirement for precise alignment between layers in the built-up ceramic capacitor. Because connection is assured by some of the redundant vias regardless of mis-alignments(s) and/or misregistration(s) of layers, manufacturing efficiency is enhanced. The optimum via hole size, and spacing, can even be chosen mathematically and geometrically to, given the location(s) and size(s) of each internal metallization plane(s), best and most reliably connect this plane (these planes) to one or more surface pads and/or traces. Usually this “best and most reliable” optimization is trivial; the preferred vias are preferably 2 mils in diameter on 10 mil centers in square “pin grid” arrays over the entire planar area of the ceramic capacitor, howsoever large. In other words, a regular grid array of some hundred or thousands of vias is typically punched, hydraulically drilled, laser drilled, or photochemically patterned and removed in selected ceramic layers of even the smallest capacitors. These small vias at this small spacing makes that at least 4-5 vias are redundant for even the smallest interior or surface connection areas (i.e., planes or pad) as of yet employed.

In summary, the new and improved ceramic capacitor has enhanced capacitance. It electrically connects reliably and well, with but small Equivalent Series Resistance (ESR). It adhesively connects reliably without causing undesired interference with the electrical connection. It is rugged, and resists breakage or chipping during normal handling, including by machine. It may be sophisticated, containing several smaller capacitors, which may be of differing values, in a single, monolithic package. Nonetheless to a sophisticated internal structure, the surface pads and/or traces to which electrical connection(s) is (are) made may be amply sized and well situated. The new capacitor is, of course, completely compatible with existing machines, circuits and processes.

These and other aspects and attributes of the present invention will become increasingly clear upon reference to the following drawings and accompanying specification.

1. A Ceramic Capacitor of Conventional Form (with Electrical Connection Through Opposed Exterior Pads) also Having and Connecting Internal Metallization Planes

In accordance with one of its aspects, the present invention may be considered to be embodied in a capacitor having a ceramic body (of a finite thickness) and at least one area of metallization to which electrical connects may be made on a portion of each of two opposite exterior substantially co-planar surfaces of the ceramic body. In other words there are at least two, and most commonly exactly two, opposed metallization areas, or pads, or simply “exterior metallizations.” (So far, this is the most common form of ceramic capacitor in the world.)

At least one, and most typically two, metallization planes are both interior to the body and substantially co-planar to the exterior metallizations. Each of these planes is thus more closely situated to each exterior metallization than the exterior metallizations are to each other.

At least one via, and most commonly a great number of vias, electrically connects, and most commonly redundantly electrically connects, each one of the (typically two) exterior metallizations to an associated (i.e., closest) interior metallization plane. This connection is to the end that, because capacitance between two conducting planes is by physical law inversely proportional to the distance of separation, the capacitance between at least one pair of exterior metallizations on opposite surfaces will be greater than that capacitance which would alternatively exist should no electrically connected interior metallization plane be present.

The collective area or areas of the exterior metallization upon at least one surface, and preferably both opposed surfaces, of the ceramic body is preferably not substantially co-extensive with, and is less than, the entire surface area of a face of the ceramic capacitor. Instead, this collective area is instead preferably somewhat smaller than is the surface area of the face, and is in particular withdrawn from the edges of the face. By this construction the associate interior metallization plane(s) is (are) larger than are the collective exterior metallization areas. More importantly, the reduced-area exterior metallizations are slightly withdrawn from the edges and sides of the ceramic body. By this construction the undesirable wicking of insulating adhesives, normally epoxy adhesive, onto the metallization areas (thus undesirably interfering with electrical connection) is avoided during adhesive surface mounting of the capacitors.

As previously explained, the finite thickness of the ceramic body is normally sufficient so as to permit routine handling of the ceramic capacitor without breakage. This increased thickness is now without penalty to the capacitance.

Furthermore, at least one edge of one surface, and preferably all edges of all surfaces, are rounded so as to reduce the propensity of these edges to chip. These rounded edges, which heretofore reduced the metallization area and the net capacitance, are again now realized without penalty to the capacitance.

2. A Ceramic Capacitor of Conventional Form With (i) Redundant Electrical Connections Through Multiple Vias to Internal Metallization Planes and (ii) Ample Large Pads Much Larger Than Are the Egress Areas of Any One Via

In accordance with another of its aspects, the present invention may be considered to be embodied in a capacitor having a ceramic body (of a finite thickness) and ample large exterior metallization areas, or pads, on each of opposed surfaces to the body (to which pads electrical connections may easily be made).

Notably, a plurality of metallization planes—normally two such metallization planes—are located interior to the body and co-planar to the exterior metallization areas.

A number of vias electrically connect each one of the interior metallization planes each to associated one of the exterior pads. This connection is redundant; each pad is electrically connected to its associated interior metallization plane by multiple vias. Each (connected) pad is much larger than the egress area of any one via. Finally, and in accordance with the physical law that capacitance between two conducting panes is inversely proportional to the distance of separation, the capacitance between at opposed pairs of exterior pads on opposite surfaces is greater than that capacitance which would alternatively exist should no electrically connected interior metallization plane be present.

In total, this construction makes that the ceramic capacitor is simultaneously of (i) enhanced capacitance due to its interior metallization planes while it (ii) supports reliable electrical connection to, ultimately, these interior metallization planes. It does so support this reliable electrical connection both because (i) the vias are redundant, and (ii) the pads are larger than are the egress areas of the vias, and are thus positionally tolerant of electrical connection (to other circuitry exterior to the capacitor).

3. A Ceramic Capacitor, or Other Ceramic Electrical Component, With Multiple Redundant Radiation-Patterned Vias Between Interior Conductive Regions and Each of Potentially Several Electrically Conductive External Pads

In accordance with yet another of its aspects, the present invention may be considered to be embodied in a method of manufacturing a ceramic capacitor having vias overlying an electrically conductive structure to which electrical connection may be made though the vias.

The method includes placing upon at least one surface of a parallelepiped ceramic body having a finite thickness a first metallization plane. An electrically insulating ceramic sheet or tape, suitable in a portion thereof to form a layer of a laminate electrical component, having a photosensitive binder is applied over this first metallization plane.

The entire laminate structure of (i) the holed ceramic sheet or tape layer upon (ii) the first metallization plane upon the (iii) parallelepiped ceramic body is then fired so as to create a monolithic sintered body. A second metallization plane is patterned into at least one electrically conductive pad upon the sintered body, and into the holes of the sintered holed ceramic sheet or tape layer, so as to create vias in the holes. Notably, at least two of these vias electrically redundantly connect the first metallization plane to the at least one electrically conductive pad of the second metallization plane.

When considered to be embodied in an electrical component, this aspect of the invention may be recognized to be expressed as an electrically conductive region under a ceramic layer to which region electrical connection is redundantly made to electrically conductive pad regions on the top of the ceramic layer by plural vias for each said pad region, the vias being formed in the overlying ceramic layer which had in its green state a photosensitive binder by patterning this green state ceramic layer with radiation, washing away unexposed ceramic with solvent so as to form patterned holes, and sintering the ceramic and the electrically conductive region and the electrically conductive pad regions so that the holes become filled with metal and become vias.

The present invention further contemplates devices in which two or more green state ceramic layers having vias formed therein are stacked upon each other to create tiers of vias, interconnected by intermediate metallization areas. The present invention also contemplates series capacitors, R-C devices having a capacitor in either series or parallel with a resistor, and devices that are reversibly mountable, all taking advantage of redundant electrical connections by vias between interior and exterior metallization planes.

The present invention further contemplates a method in which the capacitors may be constructed from the bottom up to eliminate the need for flipping the chip to obtain top and bottom metallizations.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with a general description of the invention given above, and the detailed description given below, serve to explain the principles of the invention.

FIG. 1, consisting of FIGS. 1a-1 i and 1 k, is a diagrammatic view of one possible “family tree” of capacitors in accordance with the present invention generally characterized in that electrical connections are made on both top and on bottom surfaces of the capacitor;

FIG. 2, consisting of FIGS. 2a-2 c, is a diagrammatic view of another possible “family tree” of capacitors in accordance with the present invention generally characterized in that electrical connections are made on only one surface of the capacitor;

FIG. 3, consisting of FIGS. 3a-3 c, respectively show a top plan view, a side plan view, and an x-ray top plan view of a preferred embodiment of a ceramic chip capacitor in accordance with the present invention;

FIG. 4 is a top plan view of an entire un-diced wafer of ceramic chip capacitors in accordance with the present invention in order that the small size thereof may be illustrated;

FIG. 5 is an exploded diagrammatic side view of a preferred embodiment of a ceramic chip capacitor in accordance with the present invention;

FIG. 5a is an exploded diagrammatic side view of a method for fabricating a preferred embodiment of a ceramic chip capacitor in accordance with the present invention;

FIG. 5b illustrates the removal of the capacitor formed by the method described in FIG. 5a from the temporary substrate;

FIG. 6 is another top plan view of an entire sheet of via'd tape used in making a preferred embodiment of a ceramic chip capacitor in accordance with the present invention, the tape particularly showing the many small vias;

FIG. 7 is an exploded view of a portion of the via'd tape previously seen in FIG. 6;

FIG. 8 is a diagrammatic view of the application of a drop of epoxy adhesive to a substrate to which a ceramic chip capacitor will subsequently be mounted;

FIG. 9, consisting of FIGS. 9a-9 c, are diagrammatic views of an undesirable “creep” of the epoxy adhesive onto the electrically conductive upper surface pad of any ceramic chip capacitor, including one having buried plates in accordance with the present invention, where the pad occupies the entire upper surface of the capacitor; and a preferred embodiment of a ceramic chip capacitor in accordance with the present invention where the conductive upper surface pad is withdrawn from the edges, helping to preclude that any excess epoxy adhesive extending onto the upper surface of the capacitor should later interfere with electrical connection;

FIG. 10 is a diagrammatic view showing the manner of electrical connection to an upper surface pad of a preferred embodiment of a ceramic chip capacitor in accordance with the present invention;

FIG. 11 is a diagrammatic view illustrating the “alignment fault tolerance” of the preferred multiple redundant vias;

FIGS. 12a and 12 b are diagrammatic views illustrating a multiple tape layer configuration for a thicker ceramic chip capacitor in accordance with the present invention;

FIGS. 13a and 13 b illustrate the advantage of via size obtained in the capacitor of FIG. 12b;

FIGS. 14a-14 b and 15 a-15 b are diagrammatic views illustrating capacitors of the present invention capable of function as either a series capacitor or a multiple capacitor array;

FIG. 16 is a diagrammatic view illustrating an alternative embodiment of a series capacitor in accordance with the present invention;

FIGS. 17a-17 b are diagrammatic views illustrating a capacitor in series with a resistor in accordance with the present invention;

FIGS. 18a-18 b are diagrammatic views illustrating a capacitor in parallel with a resistor in accordance with the present invention;

FIGS. 19a-19 b are diagrammatic views illustrating surface mounted single layer series capacitors in accordance with the present invention;

FIG. 20 is a diagrammatic view illustrating a single capacitor similar to that of FIG. 19a but with double the capacitance;

FIG. 21 is an alternative embodiment of the capacitor of FIG. 20;

FIG. 22 is another alternative embodiment of the capacitor of FIG. 20 having multiple parallel capacitors; and

FIGS. 23a-23 b are diagrammatic views illustrating R-C devices having a resistor in parallel with the capacitor of FIG. 20.

DETAILED DESCRIPTION

The present invention contemplates a ceramic chip capacitor of the “parallel plate” or “single layer” type having conventional volume and external form which, nonetheless to its conventional appearance (and use), exhibits increased capacitance from use of closely spaced interior conductive planes. Moreover, these internal conductive planes, preferably two or more in number, are reliably connected to positionally tolerant exterior pads through multiple redundant vias.

The “parallel plate” or “single layer” ceramic capacitor has a very useful form factor for assembly into microwave frequency and similar electrical circuits. These circuits may be laid out on printed circuit (pc) boards, or be present on ICs within chip carriers and other packages where space is typically even more precious. The dimensions of the ceramic capacitor can be matched to the width of a strip line on the pc board or the chip carrier holding an IC.

In assembly the bottom face of the ceramic chip capacitor is typically soldered to or conductive epoxy attached to the surface of the pc board substrate. The top face of the ceramic capacitor normally presents one or more electrically conductive pads that are typically ribbon- or wire-bonded to another circuit connection point.

Most ceramic chip capacitors currently offered (circa 1997) are made by metallizing two faces of a thin sheet of sintered ceramic that is typically in the range of 4 mils (inches) to 10 mils (inches) thick. The metallized ceramic sheet is then cut to size by sawing or abrasive cutting techniques. Typical sizes of the chip capacitors range from 10 mils (inches) square to 50 mils (inches) square, although some applications use rectangular forms.

While the form factor of these simple devices—used in quantities of hundreds of millions per year—is highly desirable, the amount of capacitance that can be achieved and quality of the devices realizing maximum capacitance is starting to limit their usefulness in certain applications. The simplified equation for the capacitance of a parallel plate capacitor, c=KA/d where K is the dielectric constant, A the area of each of opposed plates, and d the distance of separation between plates, shows that a 20 mil square part (A) of 5 mils thickness (d) made from ceramic with a relative dielectric constant of 100 yields a capacitance of 8 picofarads.

This five mils thickness—necessitated in order to establish some structural strength for the given area size of, for example, 20 mils×20 mils—makes that the capacitor does not have much structural strength, and is subject to undesirable fracturing or chipping during routine handling and assembly into circuits. Thus the physical resistance to damage of the highest-capacitance “parallel plate” or “single layer” ceramic capacitors is innately poor. The design of single-layer capacitors in general is a compromise between the use of thicker ceramic layers for greater strength and thinner ceramic layers for greater capacitance.

A diagrammatic view of one possible “family tree” of capacitors in accordance with the present invention is shown in FIG. 1, consisting of FIGS. 1a-1 i. The capacitors 1 a-1 i are generally characterized in that electrical connections are made on both top and on bottom surfaces of the capacitor.

Capacitor 1 a shown in FIG. 1a may be considered rudimentary, consisting of one interior metallization plane 1 a 1 that is connected to a one of the external pads 1 a 2, 1 a 3 (pad 1 a 3 is shown connected) through a preferably plural number of vias 1 a 4. The preferably several vias may be considered to be “lined up” into the depth of the drawing although, as will be seen, the several redundant vias are occasionally explicitly illustrated such as in, inter alia, FIGS. 1h and 1 i.

A more typical capacitor is capacitor 1 b shown in FIG. 1b. Herein two interior metallization planes 1 b 10 and 1 b 11 are respectively connected to external pads 1 b 2, 1 b 3 through the preferably plural vias 1 b 40, 1 b 41. Again the preferably several vias may be considered to be “lined up” into the depth of the drawing.

The two interior metallization planes need not be most closely adjacent the external pads to which they connect, as is shown by internal metallization planes 1 c 10 and 1 c 11 respectively connecting to external pads 1 c 2 and 1 c 3 in the capacitor 1 c of FIG. 1c.

Plural interior metallization planes may be present, as illustrated in the capacitor 1 d of FIG. 1d. Although the vias of the capacitors 1 c and 1 d are redundant (many such existing in line into the depth of the drawings), these embodiments require better alignment during fabrication, at least in one direction, that is generally typical for embodiments of the invention, as will be later explained. Consequently, the higher capacitance of the embodiments 1 c and 1 d comes at the cost of greater precision in fabrication.

A preferred implementation of the invention as a capacitor 1 e having multiple vias in each of two, as opposed to one, axes is illustrated in FIG. 1e.

Multiple capacitors 1 f-1 i and 1 k are respectively illustrated in FIGS. 1f-1 i and 1 k. A “series capacitor” if shown in FIG. 1f has a passive internal metallization layer 1 f 11, not directly connected, that serves to buffer electrostatic communication between internal metallizations 1 f 10 and 1 f 12, which are externally electrically connected.

True “multiple capacitors” such as capacitors 1 g through 1 i and 1 k are more common. In capacitors 1 g and 1 h one internal metallization, or plate, of the plural capacitors within a single monolithic body is shared by all such capacitors. Capacitor 1 h as compared to capacitor 1 g simply illustrates, as did capacitor 1 e relative to capacitor 1 b, that the vias may be, and preferably are, redundant in each of two directions. The multiple capacitor 1 i shown in FIG. 1i contains many separate capacitors, some of which share one electrode in common and some of which share no electrodes. The multiple capacitor shown in FIG. 1k contains many capacitors, none of which share electrodes. Capacitor 1 k has the advantage that either face may be placed up during assembly and a the same wafer can be used to make both single chips and arrays.

A diagrammatic view of another possible “family tree” of capacitors in accordance with the present invention is shown in FIG. 2, consisting of FIGS. 2a-2 c. The capacitor 1 a is now evolved into capacitors 2 b and 2 c which are generally characterized in that electrical connections are made on only one surface of the capacitor.

A preferred embodiment of a ceramic chip capacitor 1 in accordance with the present invention in its simplest form is illustrated in FIGS. 3a-3 c: a top view being shown in FIG. 3a, a cut-away side view in FIG. 3b, and another, x-ray, top-plan view in FIG. 3c. The top metallization, or (in this case) single, pad 11 a is preferably surrounded by a margin 12 of the underlying ceramic. A typically identical pad 11 b (best seen in FIG. 3b) exists on the underside of the capacitor 1, which is top-bottom reversible in use.

Dimensions B and C of the ceramic capacitor 1 are typically 0.025 inches (25 mils) whereas the dimension A of the metallization 11 is typically 0.0195 inches (19.5 mils). The thickness dimension D shown in FIG. 3b is typically 0.005 inches (5 mils). Almost any reasonable overall size, and square or rectangular or other shape, is possible, with sizes in the range larger than 15 mils square being most common.

FIGS. 3c and 3 b particularly show an exemplary pattern of multiple vias groups 13 a and 13 b respectively electrically connecting to each of two, offset, electrically conductive internal planes 14 a and 14 b. The internal planes 14 a, 14 b are obviously closer together then the external metallizations, or pads 11 a, 11 b to which they respectively redundantly electrically connect through respective redundant vias groups 13 a, 13 b. This close proximity raises the capacitance. At a plate-to-plate spacing of, typically, 0.5 mils as compared to a spacing of 4 mils between the electrodes 11 a and 11 b, the resulting capacitance is ten times (×10) higher. In multiple plate capacitors this advantage can be increased.

A top plan view of an entire un-diced wafer of ceramic chip capacitors in accordance with the present invention is shown at roughly actual scale in FIG. 4. The small size of the capacitors within the arrayed capacitors 1 j may be appreciated.

The manner of the construction of the arrayed capacitors 1 j is illustrated in the exploded diagrammatic side view of FIG. 5. A center ceramic dielectric layer 15 is faced on either side with patterned metal electrodes, or plates 14 a, 14 b. The three-layer laminate is overlaid on both sides with a respective ceramic sheet, or tape, 17 a, 17 b in which are respectively present the arrayed vias 13 a, 13 b shown in FIGS. 3a and 3 b of which illustrated vias 13 a 1, 13 b 1 are exemplary. Finally, patterned metallization areas, or simply “metallizations”, or pads, 11 a, 11 b are placed upon the respective ceramic tapes 17 a, 17 b. The entire multi-layer laminate is fused together and sintered into the monolithic body of the arrayed capacitors 1 j.

Note that the vias 13 a 1, 13 b 1 which are shown in dashed line of normal thickness become filled with metal. There are a great many other vias 13 a 2, 13 b 2—shown in phantom line—which are present but through which no electrical connection is made. This is one of the simplicities, and strengths, of the present invention. The vias are typically patterned as large, closely spaced, regular “pin grid array” over the entire area of the ceramic as will prospectively be used to produce functional (ceramic capacitor) components. No special care needs be taken to use a custom via pattern for different devices, nor even to carefully (i) align and/or (ii) register the standard via pattern on the ceramic sheet. (The tolerance of the capacitors of the present invention to misalignment between their layers will be further explained in conjunction with FIG. 11.)

The vias may be created by diverse methods. They may be mechanically punched out. This simplest of methods works very well, and is thus preferred until the vias become much smaller than 2 mils in diameter. The vias may be mechanically drilled. The vias may be laser drilled.

Finally, the vias may be created by photochemical processes, which can become superior at very large array scales having high densities of extremely minute vias. In this case a finite thickness first metallization film is placed on the ceramic sheet (or body). An electrically insulating ceramic sheet or tape, suitable in a portion thereof to form a layer of a laminate electrical component and having a photosensitive binder, is placed over the metallization film. This photosensitive-binder ceramic sheet or tape is then patterned with a multiplicity of dots at regions where are desired vias by act of exposing the ceramic sheet or tape to radiation to which the photosensitive binder is sensitive through an optical pattern mask. Solvent is used to wash out the ceramic dielectric at the regions of the patterned dots where the photosensitive binder is ineffective to cohere the ceramic, producing thereby a ceramic sheet or tape layer with holes upon the first metallization plane. This laminate structure of the holed ceramic sheet or tape layer upon the first metallization plane upon a parallelepiped ceramic body is normally then fired so as to create a sintered body. Finally a second metallization plane patterned into at least one electrically conductive pad is applied upon the sintered body, and into holes of the sintered holed ceramic sheet or tape layer, so as to create vias in the holes. In accordance with the preferred implementation of the invention, at least two of these vias will electrically redundantly connect the first metallization plane to the at least one electrically conductive pad of the second metallization plane.

The ceramic part may alternatively first be made without the top and/or the back metal, sintered, and then have the top and/or back metal added using a sputtering process. This is more complicated, and likely more expensive. However, it will be realized that the buried conductive plates, ceramic layers, and via interconnection of the present invention are totally compatible with many types of surface metallizations.

There are typically some 6400 parts, or capacitors 1, per 2″ width manufacturing workpiece bar as is illustrated in FIG. 4. A wafer bar of 5″ width typically contains some 40,000 pieces. The length and width of each capacitor 1 when formed in green (unfired) ceramic is 0.025 inches (25 mils) by 0.025 inches (25 mils).

The width of the separating cut (not yet made, typically made by a diamond saw) is 0.008 inches (8 mils) in each direction: The area of each capacitor 1 is approximately 0.000289 square inches, and the total area of all 6400 hundred capacitors upon the bar is 21 square inches. Note that the workpiece bar can be singulated before or after sintering using various standard means such as a razor-edge knife, a diamond saw, or other conventional cutting and severing tools.

The method described above constructs the device, arrayed capacitor 1 j, from the middle, outward. In other words, the device is fabricated starting with the center ceramic dielectric layer 15, and then each side is alternately patterned with metallizations 14, overlaid with ceramic tape 17, and patterned with metallizations 11. Then the entire body is sintered. This method requires flipping the device over to form the structure on either side of the center ceramic dielectric layer 15, which requires aligning one side versus the other.

FIG. 5a depicts an alternative method of the present invention for fabricating arrayed capacitors 1 j. In this alternative method, the device is built from the bottom up by utilizing a temporary substrate 20, thereby eliminating the need to flip and realign the device. The temporary substrate 20 comprises a material having good release characteristics, meaning that it is smooth, with low or little affinity for things to stick to it. Exemplary substrates include Teflon® and Mylar®. The patterned external metallizations or pads 11 b are printed onto the temporary substrate 20. The pads 11 b are then overlaid with green ceramic sheet or tape 17 b in which are present the arrayed vias 13 b. The vias 13 b may be formed by a laser. Alternatively, the vias 13 b may be formed by the photochemical process described above after overlaying the pads 11 b with the ceramic sheet or tape 17 b. Electrodes or internal plates 14 b are then printed onto the surface of the tape 17 b, and vias 13 b 1 are thereby filled with metal. The center ceramic dielectric layer 15 is then laid upon the internal metallization plates 14 b. Internal metallization plates 14 a are then printed onto the surface of the ceramic layer 15. The internal plates 14 a are then overlaid with ceramic tape 17 a in which are present the arrayed vias 13 a. The patterned external metallizations or pads 11 a are printed onto the tape 17 a, and vias 13 a 1 are thereby filled with metal. The entire multi-layer laminate is fused together, such as by isostatic pressing, and then removed from the temporary substrate 20, as shown in FIG. 5b. Because the green ceramic tape 17 b has surface texture and porosity, the printed metal 11 b preferentially sticks to the tape 17 b instead of the smooth temporary substrate 20. Thus, the laminated device is easily removed from the substrate. Finally, the arrayed capacitor 1 j is diced then sintered, or sintered then diced.

In an alternative method, external metallizations 11 b, 11 a are not printed, but rather are sputtered on after sintering. More specifically, green ceramic tape 17 b is laid directly on temporary substrate 20, and the process is continued as described above to apply metallization 14 b, ceramic layer 15, metallization 14 a and tape 17 a. The laminate is then pressed and sintered. Both the top and bottom of the device are subjected to a sputtering process to form metallizations 11 a and 11 b on ceramic layers 17 a and 17 b, respectively, thereby filling the vias 13 a and 13 b. The arrayed capacitor 1 j can then be diced into chips. While this unfortunately requires flipping of the device to create the exterior electrodes, there may be advantages in some applications for sputtered electrodes rather than printed electrodes.

While the bottom up method utilizing a temporary substrate has been described in conjunction with capacitors of the present invention, it should be understood that this method is applicable as an alternative fabrication method for capacitor structures previously known that include metallizations adjacent a green ceramic. Using this method, the device need not be turned upside-down and a new mask aligned to create the bottom conductor plate after the top conductor plate has been printed. Rather, the entire device can be fabricated in one sequence with one mask. More specifically, one or more first metallization pads are printed onto the temporary substrate 20, then the green ceramic is applied thereon. Finally, one or more second metallization pads are printed on the green ceramic. This structure, which contains no internal metallizations is then fused together and removed from the temporary substrate. Thus, the device need not be flipped over to create the second set of metallization pads, and thus, a new aligned mask need not be provided. This bottom up method therefore reduces process time and tooling.

Another plan view of an entire un-diced wafer of a preferred embodiment of arrayed capacitors 1 j (previously seen in FIG. 4) in accordance with the present invention is shown in FIG. 6. The many small vias 13 a (or 13 b) are in particular illustrated. The dimension E of the wafer is typically 5.5 inches; the dimension F 1.75 inches; the dimension G 1.75 inches; and the dimension H 2.0 inches. Other hole pitch and spacings are possible depending upon the particular capacitor being constructed (see FIGS. 1 and 2) and the metallization area requirements.

An exploded view of a portion of the un-diced wafer of the preferred embodiment of arrayed capacitors 1 j shown in FIG. 6 is illustrated in FIG. 7. Regularly arrayed vias 13 a (or 13 b) (shown in FIGS. 3b and 3 c) of which vias 13 a 1 (or 13 b 1) (typical) are exemplary are illustrated. The typical diameter of each via 13 a (or 13 b) is 0.002 inches (2 mils). The dimension I is typically 0.017 inches (17 mils); the dimension J 0.017 inches (17 mils); the dimension K 0.0085 inches (8.5 mils); and the dimension L 0.0085 inches (8.5 mils).

A major advantage of the preferred embodiment ceramic capacitor of the invention is the reduced or “pulled back” aspect of its surface metallization. The effect of the reduced area of surface metallization is diagrammatically illustrated in FIGS. 8-10. The reduction of the area of the surface metallizations 11 a, 11 b is without effect on the capacitance, which is determined by the interior conductive planes 14 a, 14 b (shown in FIGS. 3b and 3 c).

A diagrammatic view of the application of a drop of epoxy adhesive 2 to a substrate 3 to which the ceramic chip capacitor 1 will subsequently be mounted is shown in FIG. 8. A diagrammatic view of a ceramic chip capacitor 1 in accordance with the present invention set upon a pool of epoxy 2 upon a substrate 3 is illustrated in FIG. 9a. A diagrammatic view of an undesirable “creep” of the epoxy adhesive 2 onto the electrically conductive upper surface pad 11 a of a ceramic chip capacitor 1 in accordance with the present invention, or any similar capacitor of the prior art, is illustrated in FIG. 9b. FIG. 9c is a diagrammatic view showing, however, that the preferred embodiment of a ceramic chip capacitor 1 having a conductive upper surface metallization, or pad, 11 a that is withdrawn from the edges helps to preclude that any excess epoxy adhesive 2 should extend onto the upper surface of the capacitor 1, and should thereafter interfere with electrical connection. A diagrammatic view of this electrical connection is shown in FIG. 10. Connection is made to the upper surface metallization, or pad, 11 a of the preferred embodiment ceramic chip capacitor 1 by the soldered, or ultrasonically bonded, wire 4. As will be discussed in further detail below in conjunction with FIGS. 12a-12 b and 13 a-13 b, the undesirable creep of epoxy can also be reduced by making a thicker capacitor regardless of pull back of the upper surface metallization, and this can be accomplished without sacrificing capacitance.

The “alignment fault tolerance” of the multiple vias is illustrated in FIG. 5, and again, in detail, in FIG. 11. Each interior metallization plane 14 a, 14 b within the ceramic capacitor 1 is redundantly electrically connected to a respective associated exterior pad 11 a, 11 b by plural (in FIG. 5 illustrated as two; FIG. 11 is turned 90°) vias of vias groups 13 a 1 and 13 b 1. By this construction the enhanced-capacitance ceramic capacitor may be reliably conventionally fabricated in the huge arrays (typically many thousands of capacitors) on workpiece “bars” as illustrated in FIG. 4 regardless than any single one via, for example illustrated the single via of via group 13 a 2 isolated in the expanded view of FIG. 11, may not be properly located. Additionally, the redundant vias make a low-resistance electrical connection useful at high frequencies.

Typically the “pin grid array” regular geometric pattern or closely spaced vias results in at least two, and normally many more than two, vias making electrical connection between each external pad and its corresponding internal metallization plane (and vice versa). Massive parallelism, and redundancy, is not and should not be eschewed: it is perfectly acceptable for all aspects (including structural aspects) of capacitor performance that many hundreds of vias should be in electrical parallel.

Note that, although many vias such as those of via groups 13 a 1 and 13 b 1 (shown in FIG. 5) do make electrical connection to metallization, many others of the “pin grid array” of closed spaced vias, such as those of via groups 13 a 2 and 13 b 2, do not. Typically more than 50% but less than 100%, and more commonly 70% to 90% of the vias are electrically connected, depending upon the design of the capacitor metallizations. (Conversely, typically more than 0% but less than 50%, and more commonly 30% to 10% of the vias are not electrically connected, again depending upon the design of the capacitor metallizations.)

The unused vias are “empty”, and do not fill with metal during capacitor fabrication. They tend to fill up with ceramic, and to close, during fabrication, and this closure can be manipulated and promoted if desired. However, the empty vias do not cause any subsequent capacitor performance problems, and are harmless and vestigial artifacts of fabrication.

The purpose of the multiple regularly arrayed vias (best seen in FIGS. 4 and 5) is to permit the fabrication of diverse capacitors with the same via array. This is best illustrated in FIG. 7, where a number of (illustrated interior) metallization planes 14 are each redundantly electrically connected by vias such as via groups 13 a 1 (or 13 b 1). Other via groups, such as 13 a 2 (or 13 b 2) are empty, and unused.

The multiple vias result in at least two, and normally many more than two, vias making electrical connection between each external pad and its corresponding internal metallization plane (and vice versa). Massive parallelism, and redundancy, is not, and should not be, eschewed in the present invention: it is perfectly acceptable for all aspects (including structural aspects) of capacitor performance that many hundreds of vias should be placed in electrical parallel.

In another exemplary embodiment of the present invention, a single layer capacitor having a single ceramic dielectric layer and buried internal metallization planes connected to external metallizations or pads may be made thicker by forming green ceramic portions that include multiple tape layers without decreasing the capacitance of the device. FIGS. 12a and 12 b illustrate this embodiment. Referring specifically to FIG. 12a, a two via tape structure 12 a is depicted in which green ceramic portion 17 a comprises two tape layers 17 a 1, 17 a 2, each containing arrayed vias 13 a, and green ceramic portion 17 b comprises two tape layers 17 b 1, 17 b 2, each containing arrayed vias 13 b. Adjacent tape layers 17 a 1, 17 a 2 and 17 b 1, 17 b 2 are separated by metallization. For example, using the basic bottom up process described with respect to FIG. 5a, after tape layer 17 b 1 is applied on exterior metallization 11 b, an internal metallization 14 b 1 is printed thereby filling the vias 13 b in tape layer 17 b, then tape layer 17 b 2 is applied. Internal metallization 14 b 2 is then printed thereby filling the vias 13 b in tape layer 17 b 2. Ceramic dielectric layer 15 is then laid upon metallization 14 b 2. This multiple tape layer configuration can comprise as many alternating layers of green ceramic tape and metallization as desired. Metallization 14 a 1 is next printed upon ceramic layer 15. Tape layer 17 a 1 is applied on internal metallization 14 a 1 and metallization 14 a 2 is printed thereby filling vias 13 a in tape layer 17 a 1. Tape layer 17 a 2 is then laid down and external metallization 11 a is printed thereby filling vias 13 a in tape layer 17 a 2. Alternatively, a middle out process could be used, such as described with respect to FIG. 5. Thus, there is provided a capacitor that includes multiple tiers of vias within the ceramic body for reliably electrically connecting the interior metallizations to the exterior metallizations, and specifically in this embodiment, two tiers of vias making the redundant electrical connections.

Referring specifically to FIG. 12b, a three via tape structure is depicted in which green ceramic portion 17 a comprises three tape layers 17 a 1, 17 a 2, 17 a 3 each containing arrayed vias 13 a, and green ceramic portion 17 b comprises three tape layers 17 b 1, 17 b 2, 17 b 3 each containing arrayed vias 13 b. One advantage to this multiple tape layer design is that via holes are optimally made at a 1:1 to 2:1 height to width ratio, advantageously about 1:1, and so thinner tape layers can have smaller diameters. If the green ceramic portions 17 a, 17 b are to be 3 mils thick each (T₁), for example, a single via tape structure would need tape layers 17 a 1 and 17 b 1 to include vias having a 3 mil diameter (d₁) to achieve a 1:1 ratio (T₁:d₁). This could leave a large scale bumpy surface, as depicted in FIG. 13a. For the same green ceramic portion thickness T₁, a three via tape structure, as depicted in FIG. 12b, would need tape layers 17 a 1, 17 a 2, 17 a 3, 17 b 1, 17 b 2, 17 b 3 to be 1 mil thick each (T₂, T₃, T₄) and to include vias having a 1 mil diameter (d₂, d₃, d₄) to achieve a 1:1 ratio (T₂:d₂, T₃:d₃, T₄:d₄). The smaller diameter vias create a smoother surface, as depicted in FIG. 13b. Another advantage of the multiple tape layer structure (or tiered via structure) is that the device can be made to the same thickness as the IC, such that wire bonding works better and wire lengths can be reduced, which is preferred for high frequency, all without sacrificing the high capacitance obtained by the internal metallizations. Also, the increased thickness of the device reduces the likelihood that epoxy will wick up to the top of the device and short the capacitor, as described above.

FIGS. 1f and 2 c described above depict series capacitor designs in accordance with the present invention. The device of FIG. 2c further takes advantage of the multiple redundant vias in accordance with the present invention. Additional series designs, however, are within the scope of the present invention. In particular, the present invention contemplates a chip design that can be used either as a multi-capacitor array or as a series capacitor, depending on which side is placed down on the circuit board. FIGS. 14a and 15 a depict designs for capacitors 26, 28, respectively, similar to that shown in FIGS. 1f and 2 c, except there are no passive internal electrodes. Rather, electrical connections are made on both the top and bottom of the capacitors 26, 28 and multiple parallel metallizations 30, 32 are formed buried within the capacitors 26, 28. The large pad 34 on the bottom can be soldered or epoxy bonded to a circuit board 40, and the small multiple pads 36 on the top can be wire bonded to the circuit board 40. The result is multiple capacitors in parallel, such as to ground for filtering. FIGS. 14a and 15 a specifically depict two capacitor arrays, but any number may be formed in parallel.

These same capacitors 26, 28 may be flipped over and used as surface mounted series capacitors, as shown in FIGS. 14b and 15 b. Electrical connections are made to the small pads 36 on the bottom, and no connection is made to the large pad 34 on the top. For example, the small pads 36 are soldered or epoxy bonded to the circuit board 40. Soldering or epoxy bonding the series capacitor down is generally less expensive than wire bonding, thus providing an additional advantage. The devices of FIGS. 15a and 15 b take advantage of the multiple redundant vias in accordance with one aspect of the present invention. This series capacitor design has the advantage over prior devices in that the active ceramic is buried with both electrodes, giving better ceramic properties and higher frequency. Moreover, the capacitance is higher because the plates are closer together. Devices 26, 28 may also include tiered vias as described above with respect to FIGS. 12a and 12 b.

FIG. 16 provides another alternative for a series capacitor 48 in accordance with the present invention. Green ceramic tape layer 50 with vias 52 forms the center of the capacitor 48, with an internal metallization 54 and an active ceramic plate 56 on both top and bottom thereof. External pads 58 are formed on the top and bottom of the capacitor 48 and electrical connections made thereto. This design has the advantage of reliability, in that one device can short while the other continues to serve as a capacitor. As described above, multiple tape layers 50 may be used to form the center with tiered vias to thereby optimize the filling of the vias 52 and/or to make the device thicker.

The multiple redundant via ceramic tape, including tiered vias, may also be used for fabricating R-C devices. In yet another alternative embodiment of the present invention, FIG. 17a depicts an R-C device 60 having a resistor in series with a capacitor. To this end, a structure similar to that depicted in FIG. 1e is formed, except that vias 62 a in ceramic tape layer 64 on one side of the active ceramic layer 68 are filled with a resistor material, and vias 62 b in ceramic tape layer 66 on the other side of the active ceramic layer 68 are filled with the conductor material. Conductor materials are inks, also called pastes, that are commonly made using precious metal powders, such as silver, palladium, gold and platinum. Any alloy of these precious metals is functional as a conductor material, and they are chosen based on the process requirements: firing temperature, stability in the ceramic, cost and the like. For example, in multilayer capacitors that fire at 1300° C., 100% Pd may be used. For multilayer capacitors that fire at 1130° C., 30% Pd/70% Ag may be used. Some of the newest ceramic systems fire cool enough to use 100% Ag. Conductor pastes generally have resistivity values of 0.001 to 0.003 ohms per square. Resistor pastes are commonly made using ruthenium oxide as a main constituent, and glass as the other constituent. To make a high resistivity paste, very little ruthenium oxide is used. To make a low resistivity paste, a high percentage of ruthenium oxide is used. Resistor pastes are commercially available from such sources as Dupont, Heraeus, or Ferro corporations. Resistor pastes generally come in values of 1 to 1 million ohms per square (for example 10, 100, 1000, 1000, . . . ). The term “ohms per square” refers to the resistance exhibited from a standard thickness of material. Resistor values can be controlled by varying the ohms per square of resistor material, the number of vias, the diameter of the vias, and/or the thickness of the top ceramic layer 64 containing vias 62 a. FIG. 17b depicts a more simplified version of an R-C device 61 in which ceramic tape layer 66 is eliminated. Thus, the resistor is formed in ceramic tape layer 64 having resistor material in vias 62 a, and the capacitor is formed between the single interior plate 65 and exterior pad 67.

FIG. 18a depicts an R-C device 70 having a resistor in parallel with a capacitor. To this end, a structure similar to that depicted in FIG. 1e is formed, except that the center active ceramic layer 72 is provided with vias 74 a filled with a resistor material. Ceramic tape layers 76, 78 on either side of center active ceramic layer 72 have vias 74 b filled with a conductive material. FIG. 18b depicts a more simplified version of an R-C device 71 in which ceramic tape layer 76 is eliminated. Thus, the resistor is formed in ceramic tape layer 72 having resistor material in vias 74 a, and the capacitor is formed between the single interior plate 75 and exterior pad 77. Thus, R-C devices can be fabricated in accordance with the present invention to contain a resistor in parallel or in series with a capacitor.

The device 80 depicted in FIG. 19a is a series capacitor similar to FIGS. 1f and 2 c, but flipped over for soldering or epoxy bonding the pads or exterior metallizations 82 to the circuit board, which provides good quality mounting. End terminations 84 a, 84 b are provided at the sides 86 a, 86 b of the ceramic body 86 for applying the voltage differential to the device 80. This device 80 has a capacitance of C/2. FIG. 19b depicts a device 81 having two series capacitors. One series capacitor is adjacent the top 86 c of the ceramic body 86 and one series capacitor is adjacent the bottom 86 d of ceramic body 86, with an internal plate 88 a, 88 b associated respectively with each series capacitor. Device 81 has an advantage in that it is reversible with respect to packaging and mounting. Device 81 would also be an exemplary capacitor for utilizing two different types of dielectric to form a dual capacitor. For example, the top series capacitor could utilize a low dielectric constant K, high quality factor Q material, such as NPO or porcelain ceramic, whereas the bottom series capacitor could utilize a high K, low Q material, such as X7R ceramic.

FIG. 20 provides an alternative device 90 in which the capacitance is doubled, i.e. to a value of C, by simply shifting internal metallization plate 92 to one side 86 a of ceramic body 86 and electrically connecting it to end termination 84 a. The internal plate 94 a adjacent side 86 a has no purpose in device 90, but its existence is not harmful to the device. However, as illustrated by the device 100 of FIG. 21, to increase capacitance and maximize use of a greater area of ceramic body 86, lower internal plate 94 a could be eliminated and the lower internal plate 94 b adjacent side 86 b is extended further into ceramic body 86. In the embodiments shown, plates 94 a, 94 b touch the end terminations 84 a, 84 b, which has two advantages. First, the end terminations 84 a, 84 b essentially act as a broad via connection. This provides additional low-ESR connections from the outside plates or end terminations 84 a, 84 b to the internal plates 94 a, 94 b. Second, the chip can be easily tested in standard automated equipment by accessing the ends of the chip.

While FIGS. 20 and 21 depict a single capacitor, a device 98 having an array of capacitors in parallel may be provided, as shown in FIG. 22. Multiple pads 82 are provided on the bottom 86 d of ceramic body 86 for conductively bonding to the circuit board, and multiple lower internal plates 94 b are provided opposite respective pads 82 with vias for the electrical interconnection. The internal metallization plate 92 extends from the electrical connection at end termination 84 a across in opposing relation to each set of respective lower internal plates 94 b and pads 82. End termination 84 b may be eliminated as in FIG. 22 and the voltage differential is applied through each of the pads 82 and the end termination 84 a.

FIG. 23a depicts yet another embodiment of an R-C device 110, which utilizes the capacitor device 90 (or 100, not shown) and further adds a resistor material 112 on the top 86 c of ceramic body 86 to thereby form a capacitor in parallel with a resistor. Thus, by placing the chip with the pads 82 on the bottom 86 d of ceramic body 86 for epoxy bonding to the circuit board, and adding end terminations 84 a, 84 b, the chip may be used as a surface mounted single layer capacitor device 90 or as a parallel R-C device 110 by simply adding a resistor material 110 to the top of the chip. The device 120 depicted in FIG. 23b is similar to device 110, but rather than adding resistor material 112 to top 86 c, the resistor is formed by adding resistor material 122 to bottom 86 d of ceramic body 86 between pads 82.

In accordance with the preceding explanation, variations and adaptations of ceramic chip capacitors in accordance with the present invention will suggest themselves to a practitioner of the electrical component design arts. For example, ceramic chip capacitor of alternative volumes and external forms (other than single-plate capacitors) could be adapted to the principles of the present invention. For example, just one, or three or more, closely spaced interior conductive planes could be used. Redundant connection to positionally tolerant exterior pads could transpire through multiple redundant vias arrayed and arranged in diverse patterns.

According to these and other possible variations, the present invention should be determined in accordance with that embodiment within which the invention has been taught. 

What is claimed is:
 1. A method for making a capacitor having first and second exterior opposed coplanar surfaces, the method comprising providing a temporary substrate and forming the capacitor on the substrate beginning with the first exterior surface upward to the second exterior surface including forming a green ceramic body therebetween, then removing the temporary substrate and sintering the capacitor to harden the ceramic body.
 2. The method of claim 1 wherein forming the capacitor includes the steps of: printing at least one exterior metallization area onto a top surface of the temporary substrate; overlaying the at least one printed metallization area with a green ceramic body; printing at least one exterior metallization area onto a top surface of the green ceramic body; and laminating the green ceramic body, metallization areas and temporary substrate.
 3. The method of claim 2 wherein overlaying with a green ceramic body includes the steps of: first, applying a first green ceramic layer having a plurality of first vias, and filling the first vias with a resistor material; second, printing at least one first interior metallization area onto the first green ceramic layer; and third, applying a second green ceramic layer over the at least one first interior metallization area, wherein the capacitor formed is in series with a resistor.
 4. The method of claim 2 wherein overlaying with a green ceramic body includes the steps of: first, applying a first green ceramic layer having a plurality of first vias, and filling the first vias with a conductor material; second, printing at least one first interior metallization area onto the first green ceramic layer; and third, applying a second green ceramic layer over the at least one first interior metallization area.
 5. The method of claim 4 wherein overlaying with a green ceramic body includes the steps of: first, applying a first green ceramic layer having a plurality of first vias, and filling the first vias with a conductor material; second, printing at least one first interior metallization area onto the first green ceramic layer; and third, applying a second green ceramic layer having a plurality of second vias over the at least one first interior metallization area, and filling the second vias with a resistor material, wherein the capacitor formed is in parallel with a resistor.
 6. The method of claim 4 further comprising fourth, printing at least one second interior metallization area on the second green ceramic layer and fifth, applying a third green ceramic layer over the at least one second interior metallization area.
 7. The method of claim 6 wherein the third green ceramic layer includes a plurality of second vias, and further comprising filling the second vias with a conductor material.
 8. The method of claim 7 wherein the second green ceramic layer includes a plurality of third vias, and further comprising filling the third vias with a resistor material.
 9. The method of claim 6 wherein the third green ceramic layer includes a plurality of second vias, and further comprising filling the second vias with a resistor material.
 10. The method of claim 1 wherein forming the capacitor includes the steps of: first, printing at least one exterior metallization area onto a top surface of the temporary substrate; second, overlaying the at least one printed metallization area with a first green ceramic layer; third, printing at least one first interior metallization area onto a top surface of the first green ceramic layer; fourth, overlaying the at least one first interior metallization area with a second green ceramic layer; and fifth, laminating the green ceramic body, metallization areas and temporary substrate.
 11. The method of claim 10 wherein the first green ceramic layer includes a plurality of vias, and further comprising filling the vias with a conductor material.
 12. The method of claim 11 further comprising repeating the second and third steps to form a desired number of layers of green ceramic each having a plurality of vias.
 13. The method of claim 11 further comprising, between the fourth and fifth steps, printing at least one second interior metallization area on the second green ceramic layer and applying a third green ceramic layer over the at least one second interior metallization area.
 14. A method of fabricating a ceramic capacitor comprising at least one exterior metallization area on each of opposing sides of a ceramic body, the method comprising the sequential steps of: first, providing a temporary substrate exhibiting low adhesion to a metal comprising the exterior metallization areas; second, printing at least one first exterior metallization area onto a top surface of the temporary substrate; third, overlaying the at least one printed first exterior metallization area with at least one first green ceramic tape layer having a plurality of vias; fourth, printing at least one first interior metallization area onto a top surface of the first green ceramic tape layer; fifth, overlaying the at least one printed first interior metallization area with a green active ceramic body; sixth, printing at least one second interior metallization area onto a top surface of the green active ceramic body; seventh, overlaying the at least one printed second interior metallization area with at least one second green ceramic tape layer having a plurality of vias; eighth, printing at least one exterior metallization area onto a top surface of the second green ceramic tape layer; ninth, laminating the green ceramic body, exterior metallization areas and temporary substrate; tenth, removing the temporary substrate to leave a laminated body; and eleventh, sintering the laminated body to form said ceramic capacitor.
 15. The method of claim 14, further comprising, after the tenth step, dicing the laminated body into multiple laminated bodies. 